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General Topography
Frequency
Nom: 100KHz
Spring Const.
Nom: 0.12N/m
Geometry
Special
Tip Radius
1nmMaterial
Silicon NitrideCoating
B: Reflective Au
Frequency
Nom: 300KHz
Spring Const.
Nom: 40N/m
Geometry
Rectangular
Tip Radius
30nmMaterial
0.01 - 0.025 Ωcm Antimony (n) doped SiCoating
B: Reflective Aluminum
Frequency
Nom: 525KHz
Spring Const.
Nom: 200N/m
Geometry
Rectangular
Tip Radius
30nmMaterial
0.01 - 0.025 Ωcm Antimony (n) doped SiCoating
B: Reflective Aluminum
Frequency
Nom: 130KHz
Spring Const.
Nom: 0.4N/m
Geometry
Rectangular
Tip Radius
2nmMaterial
Silicon Nitride Coating
B: Reflective Aluminum
Frequency
Nom: 75KHz
Spring Const.
Nom: 2.8N/m
Geometry
Rectangular
Tip Radius
8nmMaterial
0.01 - 0.025 Ωcm Antimony (n) doped Si
Frequency
Nom: 150KHz
Spring Const.
Nom: 5N/m
Geometry
Rectangular
Tip Radius
30nmMaterial
0.01 - 0.025 Ωcm Antimony (n) doped SiCoating
B: Reflective Aluminum
Frequency
Nom: 190KHz
Spring Const.
Nom: 35N/m
Geometry
Rectangular
Tip Radius
8nmMaterial
0.01 - 0.025 Ωcm Antimony (n) doped SiCoating
B: Reflective Aluminum
Frequency
Nom: 20KHz
Spring Const.
Nom: 0.9N/m
Geometry
Rectangular
Tip Radius
8nmMaterial
0.01 - 0.025 Ωcm Antimony (n) doped Si
Frequency
Nom: 75KHz
Spring Const.
Nom: 3N/m
Geometry
Rectangular
Tip Radius
8nmMaterial
0.01 - 0.025 Ωcm Antimony (n) doped SiCoating
B: Reflective Aluminum