Deep Trench (DT)

Deep Trench (DT) Mode is a proprietary AFM mode developed by Bruker especially for the repeatable measurement of deep semiconductor trench structures < 90 nm. This adaptive scan method, which only collects data when specific system state conditions are met, provides inline metrology capability for semiconductor fabrication. DT Mode only collects data points when “good” scan criteria are met, resulting in improved measurement precision.