Scanning Microwave Impedance Microscopy (sMIM)

Scanning Microwave Impedance Microscopy (sMIM) produces high quality images of local electrical properties with better than 50nm resolution. The technical approach is to utilize microwave reflections from a nm scale region of the sample directly under the MIM probe. The magnitude and phase of these reflections is dominated by the local electrical properties. The ScanWave sMIM measures these reflections as a function of position to create images of variations in dielectric constant and conductivity.