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Sample
Frequency
Nom: 525KHz
Spring Const.
Nom: 200N/m
Geometry
Rectangular
Tip Radius
8nmMaterial
0.01 - 0.025 Ωcm Antimony (n) doped SiCoating
B: Reflective Aluminum
Frequency
Nom: 300KHz
Spring Const.
Nom: 40N/m
Geometry
Rectangular
Tip Radius
8nmMaterial
0.01 - 0.025 Ωcm Antimony (n) doped Si
Frequency
Nom: 1400KHz
Spring Const.
Nom: 18N/m
Geometry
Triangular
Tip Radius
5nmMaterial
Silicon NitrideCoating
B: Reflective Aluminum