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Electrostatic Force Microscopy (EFM)
Frequency
Nom: 105KHz
Spring Const.
Nom: 6N/m
Geometry
Rectangular
Tip Radius
100nmMaterial
0.010-0.025 Ωcm Antimony (n) doped SiCoating
Conductive DiamondF: Conductive Diamond
B: Reflective Aluminum
Frequency
Nom: 75KHz
Spring Const.
Nom: 2.8N/m
Geometry
Rectangular
Tip Radius
8nmMaterial
0.01 - 0.025 Ωcm Antimony (n) doped Si
Frequency
Nom: 70KHz
Spring Const.
Nom: 2N/m
Geometry
Rectangular
Tip Radius
7.0nmMaterial
0.01 - 0.02 Ωcm SiliconCoating
B: Reflective Al