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PR-EX-TNIR-D-10

Frequency

Nom: 300 KHz

Spring Const.

Nom: 40N/m

Geometry

Rectangular

Tip Radius

20.0(nm)

Material

0.010-0.025Ohmcm Antimony (n) doped Si

Coating

F: Au 50 nm

B: Au 50 nm

PR-UM-TNIR-D-10

Frequency

Nom: 300 KHz

Spring Const.

Nom: 40N/m

Geometry

Rectangular

Tip Radius

20.0(nm)

Material

0.010-0.025Ohmcm Antimony (n) doped Si

Frequency

Nom: 300 KHz

Spring Const.

Nom: 40N/m

Geometry

Rectangular

Tip Radius

8(nm)

Material

0.01 - 0.025 Ωcm Antimony (n) doped Si

Coating

B: Reflective Aluminum

Frequency

Nom: 70 KHz

Spring Const.

Nom: 0.4N/m

Geometry

Triangular

Tip Radius

2(nm)

Material

Silicon Nitride

Coating

B: Reflective Aluminum

SCANASYST-AIR-HPI

Frequency

Nom: 55 KHz

Spring Const.

Nom: 0.25N/m

Geometry

Special

Tip Radius

2(nm)

Material

Silicon Nitride

Coating

B: Reflective Al

SCANASYST-FLUID+

Frequency

Nom: 150 KHz

Spring Const.

Nom: 0.7N/m

Geometry

Triangular

Tip Radius

2(nm)

Material

Silicon Nitride

Coating

B: Reflective Gold

Frequency

Nom: 75 KHz

Spring Const.

Nom: 3.0N/m

Geometry

Rectangular

Tip Radius

25(nm)

Material

0.01 - 0.025 Ωcm Antimony (n) doped Si

Coating

F: Conductive PtIr

B: Reflective PtIr

Frequency

Nom: 75 KHz

Spring Const.

Nom: 2.8N/m

Geometry

Rectangular

Tip Radius

15(nm)

Material

0.01 - 0.025 Ocm Antimony (n) doped Si

Coating

F: Conductive PtSi

B: Reflective Al

Frequency

Nom: 65 KHz

Spring Const.

Nom: 0.35N/m

Geometry

A Triangular

Tip Radius

2(nm)

Material

Silicon Nitride

Coating

B: Reflective Gold

Frequency

Nom: 320 KHz

Spring Const.

Nom: 37N/m

Geometry

Rectangular

Tip Radius

7(nm)

Material

0.01 - 0.025 Ωcm Antimony (n) doped Si

Coating

B: Reflective Aluminum

Calibration artifact: 180nm step height, 10µm pitch

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