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Scanning Capacitance Microscopy (SCM)
Frequency
Nom: 105KHz
Spring Const.
Nom: 6N/m
Geometry
Rectangular
Tip Radius
100nmMaterial
0.010-0.025 Ωcm Antimony (n) doped SiCoating
Conductive DiamondF: Conductive Diamond
B: Reflective Aluminum