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BNT-400-12
Geometry
RectangularTip Radius (nm)
Nom: 8.0
Max: 12.5
Frequency (KHz)
Nom: 320
Min: 230
Max: 410
Length (µm)
Nom: 125
Min: 115
Max: 135
Spring Const (N/m)
Nom: 42
Min: 20
Max: 80
Width (µm)
Nom: 40
Min: 38
Max: 42
Questions? Free, Online Consulting
Overview
42N/m, 320kHz, 8nm Tip Radius, 400 nm carbon nanotube spike, 5 PACK
The Bruker Nano-Tube (BNT) probe is a robust, high aspect ratio probe designed for the challenging applications in semiconductor process control.
The high aspect and hard wearing, diamond-like carbon tip is optimized for depth metrology applications.
With its ~8nm tip radius this probe also guarantees accurate roughness measure with long term repeatability.
Highlights:
1. High Aspect Ratio: “spike” length of 400 nm and width of just 36 nm enabling various critical dimension measurements of deep trenches.
2. Tilt Compensation: 12 degree compensated ensuring the “spike” is normal to the sample plane while in use, enhancing access to deep trench features.
3. Consistent Tip: Uniform width for enduring high resolution roughness measurements.
4. Longevity: Durable material properties ensure high throughput measure and overall consumable cost efficiency.
Tip Specification
Tip Height (h): 10.0-15.0 µm
Front Angle (FA): 25.0 ± 2.5º
Back Angle (BA): 17.5± 2.5º
Side Angle (SA): 20.0 ± 2.5º
Cantilever Specification
Material: Single Crystal Si
Geometry: Rectangular
Cantilevers Number: 1
Cantilever Thickness (Nom): 3.40µm
Cantilever Thickness (RNG): 2.65-4.15µm
Back Side Coating: Aluminum