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Probes → Probes Application Selector Guide → Critical Dimension (CD) → 3D Metrology

3D Metrology

EBD-CDR50
EBD-CDR50
Frequency
Nom: 300KHz
Spring Const.
Nom: 40N/m
Geometry
Rectangular
Material
0.01 - 0.025Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
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CDF100
CDF100
Frequency
Nom: 350KHz
Spring Const.
Nom: 35N/m
Geometry
Rectangualr
Material
0.01 - 0.02Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
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-
EBD-CDR25
EBD-CDR25
Frequency
Nom: 300KHz
Spring Const.
Nom: 40N/m
Geometry
Rectangular
Material
0.01 - 0.025Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
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+
-
CDR130C
CDR130C
Frequency
Nom: 350KHz
Spring Const.
Nom: 35N/m
Geometry
Rectangular
Material
0.01 - 0.02 Ωcm Antimony (n) doped Si
Coating
Carbon
B: Reflective Aluminum
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+
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